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News

Air bearing system for scanning applications offers ultra-smooth linear motion

Heason Technology : 05 November, 2012  (New Product)
NEAT's AirGlide air bearing stage, avaioable from Heason Technology, is aimed at scanning applications with ultra-smooth linear motion of +/-200nm at 5mm/s. The positional accuracy is within 3 microns for the standard version and better than 1 micron for the interferometer calibrated version.
Air bearing system for scanning applications offers ultra-smooth linear motion

The AirGlide has a bidirectional repeatability of +/- 0.3 microns over a travel range of up to 1000mm. The high-stiffness/ultra-smooth bearing system has a space saving shuttle design that features a high-speed linear brushless servomotor and perfectly suits precise velocity scanning as well as nanometre level step and repeat applications in high throughput production systems or research.

A choice of sub-micron or nanometre resolution encoders in single axis or XY configurations from 150 to 1000mm travel are available and AirGlide's impressive standard specifications include an acceleration capability to 5m/s2, maximum velocity to 1m/s and loads up to 40kg. These application-dependant values may be increased and can be adapted for specific customer requirements with Heason and Dover engineering support teams available to assist customers from initial design through to commissioning and beyond.

AirGlide includes a high flex cable management system with standardised termination connectors for simplified integration. Options include low profile Z-theta assemblies in complementary precision grades and wafer vacuum chucks. Additional signal and air lines can be routed to the top plate and customised interfacing fixture plates and complete granite machine bed and frame systems can also be provided. AirGlide's bearing system uses Dover's unique clog-free technology which provides superior reliability whilst eliminating many costly filtration components and the non contacting bearing and motor system combines for almost limitless life with extremely low maintenance.

  • Virtually unlimited service life without particle generation
  • Super low velocity ripple - ideal for scanning applications
  • High air bearing accuracy
  • Exceptional pitch and roll stiffness provide stability
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