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News

Compact turbo molecular pumps with integrated power supplies

Shimadzu Corporation : 29 August, 2013  (New Product)
Shimadzu Corporation launches new series of compact turbo molecular pumps with integrated power supplies for the semiconductor and flat panel display manufacturing industries. The new TMP-X series will contribute to reducing the costs and downsizing the footprint of manufacturing flat panel displays and semiconductor devices.
Compact turbo molecular pumps with integrated power supplies
Following the recent fall in the price of electronics equipment incorporating semiconductor devices and flat panel displays, there are growing demands for innovative methods to reduce the costs of semiconductor and flat panel display manufacturing equipment.
 
Turbo molecular pumps (TMP) produce a vacuum due to the high speed rotation of turbines that enables vacuum pumping at the molecular flow level. TMP are essential components for the manufacture of semiconductors and flat panel displays where oil free, clean, high vacuums are essential.
 
Regarding turbo molecular pumps attached to manufacturing equipment, there are growing needs for a move away from pumps where power supplies are connected with separate cables, to pumps where the power supplies are integrated into the body of the TMP itself.  Such ‘integrated power supply’ TMP would enable a reduction in the number of parts for manufacturing equipment, and enable reductions in costs.
 
The pumps in this series are extremely versatile, being compact with integrated power supplies for installation in both light and hard processes.
 
Shimadzu Corporation positions TMP as global strategic products in its product portfolio and will expand sales of the TMP-X series to North America, Taiwan, Korea, and China. 
 
Shimadzu Corporation already sells the TMP-V series of pumps with integrated power supplies for pumping inert gases used in sputter systems for ‘light processing’. The TMP-X series were developed for pumping corrosive gases used in etching equipment—so called ‘hard processing’. Notably, the TMP-X series will offer pumping speeds from 300 to 4000 litres/s to address the multifaceted needs of semiconductor and flat panel display manufactures.
 
Redesign of the conventional integrated power supply in TMP has enabled a 15% reduction in the height of the new pump whilst maintaining the pumping performance. Also, the TMP-X pumps are almost the same size as the main body of conventional TMP with separate power supply cables that are used for hard processing.
 
Pumps in the TMP-X series do not require racks and cables, as is the case in conventional separate power supply TMP. Thus this series offers a greater degree of freedom in the design of low cost, small footprint manufacturing equipment. 
 
The incorporation of a pump temperature control function and improvement of the motor power output has enabled the use of the TMP-X series of pumps for manufacturing processes involving high gas flow rates and reactive gases.
 
Furthermore, Shimadzu has continued to employ anti-corrosive coating and dynamic seals in the new pumps, thus preventing erosion of the TMP and ensuring high reliability even for hard processes employing highly corrosive gases.
 
The use of a newly developed power unit and high efficiency motor has enabled a 15% reduction (under conditions of zero load) in the power consumption compared to conventional turbo molecular pumps. This series of TMP have a low load impact on the environment.
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