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News

Direct-drive Z-axis nanopositioners for demanding positioning applications

Aerotech : 10 May, 2013  (New Product)
Aerotech’s ANT-L-Z crossed-roller, Z-axis, nanopositioning stages combine speed, accuracy, resolution, repeatability, reliability and size. They are offered in two models (ANT95-L-Z and ANT130-L-Z) and two accuracy grades.
Direct-drive Z-axis nanopositioners for demanding positioning applications

Non-contact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT-L-Z stages utilise advanced direct-drive technology pioneered by Aerotech to achieve high levels of positioning performance for high-precision positioning, disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

  • Nanometer performance in a large travel format (25, 35, 50, 60 mm travels)
  • High resolution (2nm), repeatability (75nm) and accuracy (300nm)
  • In-position stability of <2nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance

ANT-L-Z stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user-adjustable from 0 to 10kg, depending on stage model.

The ANT-L-Z family has universal mounting and tabletop patterns that allow for easy system integration. The entire ANT nanopositioner family of linear, rotary, lift, Z-axis and goniometers can be combined for flexible system designs and multi-axis configurations.

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT-L-Z stage’s 2nm minimum incremental step size provides this high level of performance. The excellent in-position stability of less than 2nm is assisted by high-quality, anti-creep, crossed-roller bearings. These stages offer virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
 
Data sheets

ANT95-L-Z

ANT130-L-Z

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